National Institute of Advanced Industrial Science and Technology (AIST) This page is a page of the former research institute. We stopped updating on March 31.2001.
E-mail to webmaster (Japanese) E-mail to webmaster (English)

Back to Top Page

Back to Research Interests Page    Back to AlN filler Page    Back to Filler-property’ Contribution to Rheology

 

 [1. Current Research]    “Research Outline (Enumeration of Current Projects)”

(7) Multilayered Gas Sensor “High-selectivity Detection of CH4 and CO gases”

   The high-fidelity VLSI electric devices (System In Package etc.) integrates several device components on the solely one board, such as capacitor, register, filter and sensor etc.  A SnO2 multilayered gas sensor was prepared by the aerosol electrostatic process.  The multilayer consisted of an internal sub-sensor layer for CH4 detection and a second sub-layer for CO detection, which was coated on the internal layer.  The CH4 sensor had a membrane structure of entangled SnO2 whisker-shaped particles.  The CO sensor comprised a dendrite structure of SnO2-Pd composite particles.  High selectivity of CH4 and CO was done based on a catalytic ability of exterior SnO2-Pd composite layer, which worked as the filter for diffusion of CO.

 

＜Functions of Aerosol Multilayered Gas Sensor＞

 

(1) High-selectivity Detection of CH4 and CO gases

(2) The gases were detected at Sole Gas Sensor Device