National Institute of Advanced Industrial Science and Technology (AIST) This page is a page of the former research institute. We stopped updating on March 31.2001.
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Research Interests (07/28/98)
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Beam processing by interaction of ion beam with solid/thin film materials
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1. Ion beam analysis
Rutherford Backscattering Spectrometry (RBS),
Erastic Recoil Detection Analysis (ERDA),
Nuclear Reaction Analysis (NRA), etc.
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2. Ion beam irradiation
Beam annealing, Ion beam mixing, Stress release, etc.
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3. Ion implantation
Impurity doping, Burid layer formation, Nano-particle formation, etc
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