Study for formation of fine particles in solid by ion implantation technology

�@The aims of this study are to reversal the technical elements which are needed for controlling size, distribution, structure and composition of fine particles in solid used by ion implantation technology, and to make sure the changes of optical, electromagnetic, chemical and mechanical properties induced by the formation of the fine particles.
�@The formation and dispersion of the fine particles in solid can be used for new device or material developments, such as opto-(electro-)devices or light emitting devices using non-linear optical property, micro-electronics devices or high density memory devices using electromagnetic property, catalyst or biocompatible material using chemical property and wear-resistant material or high hardness material using mechanical property.